JPH0137689B2 - - Google Patents

Info

Publication number
JPH0137689B2
JPH0137689B2 JP60032680A JP3268085A JPH0137689B2 JP H0137689 B2 JPH0137689 B2 JP H0137689B2 JP 60032680 A JP60032680 A JP 60032680A JP 3268085 A JP3268085 A JP 3268085A JP H0137689 B2 JPH0137689 B2 JP H0137689B2
Authority
JP
Japan
Prior art keywords
light
mirror
laser beam
detection area
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60032680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60190835A (ja
Inventor
Kunio Yamada
Fukuo Iwatani
Kazuya Tsukada
Katsumi Takami
Tadashi Suda
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP60032680A priority Critical patent/JPS60190835A/ja
Publication of JPS60190835A publication Critical patent/JPS60190835A/ja
Publication of JPH0137689B2 publication Critical patent/JPH0137689B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP60032680A 1985-02-22 1985-02-22 微粒子検出器 Granted JPS60190835A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60032680A JPS60190835A (ja) 1985-02-22 1985-02-22 微粒子検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60032680A JPS60190835A (ja) 1985-02-22 1985-02-22 微粒子検出器

Publications (2)

Publication Number Publication Date
JPS60190835A JPS60190835A (ja) 1985-09-28
JPH0137689B2 true JPH0137689B2 (en]) 1989-08-09

Family

ID=12365581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60032680A Granted JPS60190835A (ja) 1985-02-22 1985-02-22 微粒子検出器

Country Status (1)

Country Link
JP (1) JPS60190835A (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012185121A (ja) * 2011-03-08 2012-09-27 National Institute Of Advanced Industrial & Technology 光学特性測定装置
WO2015151502A1 (ja) * 2014-04-03 2015-10-08 パナソニックＩｐマネジメント株式会社 粒子検出センサ、ダストセンサ、煙感知器、空気清浄機、換気扇及びエアコン
US9739701B2 (en) 2015-07-27 2017-08-22 Panasonic Intellectual Property Management Co., Ltd. Particle sensor
CN108369171A (zh) * 2015-12-14 2018-08-03 三菱电机株式会社 微小物检测装置
WO2020203100A1 (ja) * 2019-03-29 2020-10-08 新コスモス電機株式会社 Ｍｅｍｓ型半導体式ガス検知素子

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8726304D0 (en) * 1987-11-10 1987-12-16 Secr Defence Particle asymmetry analyser
GB8726305D0 (en) * 1987-11-10 1987-12-16 Secr Defence Portable particle analysers
JPH0755490Y2 (ja) * 1990-03-15 1995-12-20 株式会社堀場製作所 液体中の微粒子測定装置
JP2015200629A (ja) * 2014-04-03 2015-11-12 パナソニックＩｐマネジメント株式会社 粒子検出センサ、ダストセンサ、煙感知器、空気清浄機、換気扇及びエアコン

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012185121A (ja) * 2011-03-08 2012-09-27 National Institute Of Advanced Industrial & Technology 光学特性測定装置
WO2015151502A1 (ja) * 2014-04-03 2015-10-08 パナソニックＩｐマネジメント株式会社 粒子検出センサ、ダストセンサ、煙感知器、空気清浄機、換気扇及びエアコン
US9739701B2 (en) 2015-07-27 2017-08-22 Panasonic Intellectual Property Management Co., Ltd. Particle sensor
CN108369171A (zh) * 2015-12-14 2018-08-03 三菱电机株式会社 微小物检测装置
WO2020203100A1 (ja) * 2019-03-29 2020-10-08 新コスモス電機株式会社 Ｍｅｍｓ型半導体式ガス検知素子

Also Published As

Publication number Publication date
JPS60190835A (ja) 1985-09-28

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